유동해석을 통한 막 모듈 처리시스템 최적화 (Membrane Module System Pattern Optimization using Phoenics Simulation)

서지정보

· 발행기관 : 한국폐기물자원순환학회
· 수록지 정보 : 한국폐기물자원순환학회지 / 31권 / 2호 / 149 ~ 160페이지
· 저자명 : 김정은, 정재칠, 육종목, 송형운, 김상우, 문정모, 장성민, 노영석

초록

This research was conducted to configure an optimal membrane module system that would selectively separate hazardous gases which are emitted during the processes in the semiconductor industry. In order to identify the most integral characteristic results, a numerical analysis formula which incorporates the dimensions of pipe diameter and gas flow rate was utilized. Based on the results of the numerical analysis formula, a prototype designed with the main pipe being 100A with gas outlets made with identical diameter thickness to the main pipe, set at equal intervals, was built. When the gas flow rate is set at 100 L/min, although the processing outlets 1, 2, and 3 showed 0.03 m/sec deviations in the rate of speed, when considering the variables of the average flow rate, the same emission rates are noted. However, in the instance of when the overall prototype pipe dimensions was enlarged to 200A and the gas flow rate was increased to 500 L/min, there was better stabilization. Therefore concluding that as the pressure rates flowing in the main pipe increases, more stable characteristics at the gas outlets can be found.

영어초록

This research was conducted to configure an optimal membrane module system that would selectively separate hazardous gases which are emitted during the processes in the semiconductor industry. In order to identify the most integral characteristic results, a numerical analysis formula which incorporates the dimensions of pipe diameter and gas flow rate was utilized. Based on the results of the numerical analysis formula, a prototype designed with the main pipe being 100A with gas outlets made with identical diameter thickness to the main pipe, set at equal intervals, was built. When the gas flow rate is set at 100 L/min, although the processing outlets 1, 2, and 3 showed 0.03 m/sec deviations in the rate of speed, when considering the variables of the average flow rate, the same emission rates are noted. However, in the instance of when the overall prototype pipe dimensions was enlarged to 200A and the gas flow rate was increased to 500 L/min, there was better stabilization. Therefore concluding that as the pressure rates flowing in the main pipe increases, more stable characteristics at the gas outlets can be found.

참고자료

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