Microscope) Light Optical Microscopy vs. Scanning Electron Microscopy SpatialResolution Depth of ... Filed Small Low Large High LOM SEMSEM(Scanning Electron Microscope) Resolution d Electron ≪ d ... - millingInteraction FIB(Focused Ion Beam)FIB(Focused Ion Beam) 3 Basic “Operating Modes” (a) Emission of s