SEM과 FIB의 원리
- 최초 등록일
- 2013.06.04
- 최종 저작일
- 2011.11
- 48페이지/ MS 파워포인트
- 가격 2,500원
목차
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본문내용
▷ Big
-> outer shell reactions (no x- rays)
▷ High interaction probability
-> less penetration depth
▷ Ions can remain trapped
-> doping
▷ High mass -> slow speed but high
momentum -> milling
Interaction
FIB(Focused Ion Beam)
FIB(Focused Ion Beam)
3 Basic “Operating Modes”
(a) Emission of secondary ions and electrons
- FIB imaging
- Low ion current
(b) Sputtering of substrate atoms
- FIB milling
- High ion current
(c) Chemical interactions (gas assisted)
- FIB deposition
- Enhanced etching
▷ other effects :
- Ion implantation
- Displacement of atoms in the solid
- Emission of phonons
참고 자료
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