금속유기화학증착법으로 사파이어 기판에 증착된 단층 SiO2, TiO2 저반사막의 광 투과율, 내열성, 기계적 특성에 관한 연구 (A Study on the Transmittance, Heat-Resistance, and Mechanical Properties of SiO2, TiO2 Anti-Reflective Single Layers Deposited on Sapphire Substrate by MOCVD)

서지정보

· 발행기관 : 한국군사과학기술학회
· 수록지 정보 : 한국군사과학기술학회지 / 17권 / 5호 / 672 ~ 679페이지
· 저자명 : 심규인, 엄형우, 강형, 최세영

초록

To improve sensing capability of infrared, heat-resistance and mechanical properties, the SiO2 and TiO2 antireflectivelayers were coated on sapphire substrate by MOCVD. The standard wavelength was 4,600nm, and thethickness of anti-reflective layers were 379 and 758nm in case of λ/4 and λ/2 of incident angle(65˚), respectively. The SiO2 and TiO2 anti-reflective layers were coated 12.6 and 9.7nm/min of deposition rates by increasing oxygenpressure to set the ideal refractive index of 1.283. In case of SiO2(λ/2) coating, the transmittance increased from55.0 to 62.7%. The transmittance of TiO2(λ/2) anti-reflective layer also increased from 55.0 to 64.8%. The flexuralstrength of SiO2(λ/2) and TiO2(λ/2) layer coated sapphire increased from 337.8 to 362.9 and 371.8MPa,respectively. The flexural strength at 500℃ of these materials also increased respectively to 304.5, 358.2MPa from265.9MPa. From these results, we confirmed these materials can be used as transmission window of infrared light.

영어초록

To improve sensing capability of infrared, heat-resistance and mechanical properties, the SiO2 and TiO2 antireflectivelayers were coated on sapphire substrate by MOCVD. The standard wavelength was 4,600nm, and thethickness of anti-reflective layers were 379 and 758nm in case of λ/4 and λ/2 of incident angle(65˚), respectively. The SiO2 and TiO2 anti-reflective layers were coated 12.6 and 9.7nm/min of deposition rates by increasing oxygenpressure to set the ideal refractive index of 1.283. In case of SiO2(λ/2) coating, the transmittance increased from55.0 to 62.7%. The transmittance of TiO2(λ/2) anti-reflective layer also increased from 55.0 to 64.8%. The flexuralstrength of SiO2(λ/2) and TiO2(λ/2) layer coated sapphire increased from 337.8 to 362.9 and 371.8MPa,respectively. The flexural strength at 500℃ of these materials also increased respectively to 304.5, 358.2MPa from265.9MPa. From these results, we confirmed these materials can be used as transmission window of infrared light.

참고자료

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