DLC 박막의 전기전도성, 투과율 및 가스베리어 특성에 관한 연구 (Study on Electrical Conductivity, Transmittance and Gas Barrier Properties of DLC Thin Films)

서지정보

· 발행기관 : 한국열처리공학회
· 수록지 정보 : 열처리공학회지 / 31권 / 4호 / 187 ~ 193페이지
· 저자명 : 박새봄, 김치환, 김태규

초록

In this study, the electrical conductivity, transmittance and gas barrier properties of diamond-like carbon (DLC) thin films were studied. DLC is an insulator, and has transmittance and oxygen gas barrier properties varying depending on the thickness of the thin film. Recently, many researchers have been trying to apply DLC properties to specific industrial conditions. The DLC thin films were deposited by PECVD (Plasma Enhanced Chemical Vapor Deposition) process. The doping gas was used for the DLC film to have electrical conductivity, and the optimum conditions of transmittance and gas barrier properties were established by adjusting the gas ratio and DLC thickness. In order to improve the electrical conductivity of the DLC thin film, N2 doping gas was used for CH4 or C2H2 gas. Then, a heat treatment process was performed for 30 minutes in a box furnace set at 200oC. The lowest sheet resistance value of the DLC film was found to be 18.11 kΩ/cm2. On the other hand, the maximum transmittance of the DLC film deposited on the PET substrate was 98.8%, and the minimum oxygen transmission rate (OTR) of the DLC film of C2H2 gas was 0.83.

영어초록

In this study, the electrical conductivity, transmittance and gas barrier properties of diamond-like carbon (DLC) thin films were studied. DLC is an insulator, and has transmittance and oxygen gas barrier properties varying depending on the thickness of the thin film. Recently, many researchers have been trying to apply DLC properties to specific industrial conditions. The DLC thin films were deposited by PECVD (Plasma Enhanced Chemical Vapor Deposition) process. The doping gas was used for the DLC film to have electrical conductivity, and the optimum conditions of transmittance and gas barrier properties were established by adjusting the gas ratio and DLC thickness. In order to improve the electrical conductivity of the DLC thin film, N2 doping gas was used for CH4 or C2H2 gas. Then, a heat treatment process was performed for 30 minutes in a box furnace set at 200oC. The lowest sheet resistance value of the DLC film was found to be 18.11 kΩ/cm2. On the other hand, the maximum transmittance of the DLC film deposited on the PET substrate was 98.8%, and the minimum oxygen transmission rate (OTR) of the DLC film of C2H2 gas was 0.83.

참고자료

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