고온 화학센서용 다결정 3C-SiC 쇼트키 다이오드 제작과 그 특성 (Fabrication and characteristics of polycrystalline 3C-SiCSchottky diodes for high temperature chemical sensors)

서지정보

· 발행기관 : 한국센서학회
· 수록지 정보 : 센서학회지 / 17권 / 6호 / 414 ~ 417페이지
· 저자명 : 정귀상, 안정학

초록

We have been implemented simple statistical pattern recognition methods for harmful gases classification using gas
sensors array fabricated by MEMS (Micro Electro Mechanical System) technology. The performance of pattern recognition
method as a gas classifier is highly dependent on the choice of pre-processing techniques for sensor and sensors array
signals and optimal classification algorithms among the various classification techniques. We carried out pre-processing
for each sensor’s signal as well as sensors array signals to extract features for each gas. We adapted simple statistical
pattern recognition algorithms, which were PCA (Principal Component Analysis) for visualization of patterns clustering
and MLR (Multi-Linear Regression) for real-time system implementation, to classify harmful gases. Experimental results
of adapted pattern recognition methods with pre-processing techniques have been shown good clustering performance and
expected easy implementation for real-time sensing system.

영어초록

We have been implemented simple statistical pattern recognition methods for harmful gases classification using gas
sensors array fabricated by MEMS (Micro Electro Mechanical System) technology. The performance of pattern recognition
method as a gas classifier is highly dependent on the choice of pre-processing techniques for sensor and sensors array
signals and optimal classification algorithms among the various classification techniques. We carried out pre-processing
for each sensor’s signal as well as sensors array signals to extract features for each gas. We adapted simple statistical
pattern recognition algorithms, which were PCA (Principal Component Analysis) for visualization of patterns clustering
and MLR (Multi-Linear Regression) for real-time system implementation, to classify harmful gases. Experimental results
of adapted pattern recognition methods with pre-processing techniques have been shown good clustering performance and
expected easy implementation for real-time sensing system.

참고자료

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