자유곡면가공기용 초정밀 회전테이블의 설계 및 평가 (Design and Evaluation of an Ultra Precision Rotary Table for Freeform Machine Tools)

서지정보

· 발행기관 : 한국정밀공학회
· 수록지 정보 : 한국정밀공학회지 / 27권 / 7호 / 94 ~ 100페이지
· 저자명 : 황주호, 박천홍

초록

This paper describes the design and evaluation procedure of an ultra-precision rotary table for freeform generating machined tools. Design of the thrust and journal hydrostatic bearings and experimental evaluation of the table were performed. To get the compact size and less lost motion direct drive servomotor with ultra precision encoder. From the considered design,following performance were confirmed by experiment. The total stiffness of the prototype rotary table was 483.6 N/μm and 97.6 N/μm for axial and radial direction, respectively. Rotational accuracy of the table was investigated by capacitive sensor and reversal measurement technique, and 0.10 μm radial direction and 0.05 μm axial direction of the rotational accuracy were confirmed. The micro resolution of the table was also investigated with displacement of capacitive sensor, and 0.5/10000° of micro resolution was confirmed. Index accuracy of the table was evaluated by the autocollimator and polygon mirror, and the ±0.39 arcsec accuracy and ±0.16 arcsec repeatability of the table were confirmed. Those are under the general requirements of ultra precision rotary tables for freeform generating machined tools.

영어초록

This paper describes the design and evaluation procedure of an ultra-precision rotary table for freeform generating machined tools. Design of the thrust and journal hydrostatic bearings and experimental evaluation of the table were performed. To get the compact size and less lost motion direct drive servomotor with ultra precision encoder. From the considered design,following performance were confirmed by experiment. The total stiffness of the prototype rotary table was 483.6 N/μm and 97.6 N/μm for axial and radial direction, respectively. Rotational accuracy of the table was investigated by capacitive sensor and reversal measurement technique, and 0.10 μm radial direction and 0.05 μm axial direction of the rotational accuracy were confirmed. The micro resolution of the table was also investigated with displacement of capacitive sensor, and 0.5/10000° of micro resolution was confirmed. Index accuracy of the table was evaluated by the autocollimator and polygon mirror, and the ±0.39 arcsec accuracy and ±0.16 arcsec repeatability of the table were confirmed. Those are under the general requirements of ultra precision rotary tables for freeform generating machined tools.

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