MWCNT/ZnO 복합체 필름을 이용한 가스센서의 NOX 가스 검출 특성 분석 (The Analysis of NOX Gas Detection Characteristics for the Gas Sensor Using the MWCNT/ZnO Composites Film)

서지정보

· 발행기관 : 한국전기전자재료학회
· 수록지 정보 : 전기전자재료학회논문지 / 29권 / 5호 / 312 ~ 316페이지
· 저자명 : 장경욱, 김현수, 이원재, 박용서

초록

본 연구에서는 우수한 전도 특성과 화학적 안정성을 지녔으며 소형화 및 대량생산이 가능한 카본 나노 튜브(carbon nanotubes, CNT)를 열적 화학 기상 성장법(Thermal Chemical Vapor Deposition)을 통해 제조된, MWCNT (Multi-Walled Carbon Nanotube)와 산화아연(zinc oxide, ZnO)을 이용하여 MWCNT/ZnO 복합체 필름을 제작하였으며, 상온 및 온도 변화에 따른 NOX 가스 검출 특성을 산화아연 가스센서와 비교 분석하였다. 또한, 챔버 내 NOX 가스 농도에 따른 가스센서의 검출 특성을 실험하였다.

영어초록

In this study, we fabricated NOX gas sensor by using multi-walled carbon nanotubes(MWCNT)/zinc oxide(ZnO) composite film. Carbon nanotubes (CNTs) have good electronic, chemical-stability, and sensitivity characteristics. And zinc oxide (ZnO) is a wide band gap and large exciton binding energy semiconductor. In particular, gas sensors require characteristics such as high speed, sensitivity, and selectivity. The fabricated gas sensor was used to detect NOX gas for different values of the NOX gas concentrations. The gas sensor that absorbed NOX gas molecules showed a increasing in resistance. The sensitivity of the gas sensor was increased by increasing the gas concentrations. Additionally, while changing the temperature inside the chamber for the MWCNT/ZnO composite film gas sensor, we obtained the sensitivity. And the comparison analysis to ZnO film gas sensor for detecting NOX gas. From the experiment result, we confirmed improvement of NOX gas detection characteristics using the MWCNT/ZnO composite film.

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