로 열처리 및 펄스레이저에 의한 박막의 비젖음 현상을 이용한 코발트 나노 입자 형성 (Formation of Cobalt Nanoparticles by Thin Film Dewetting using Furnace and Pulse-Laser Annealing Processes)

서지정보

· 발행기관 : 대한금속·재료학회
· 수록지 정보 : 대한금속·재료학회지 / 47권 / 5호 / 316 ~ 321페이지
· 저자명 : 황석훈, 김정환, 오용준

초록

Co nanoparticles on silica substrates were fabricated by inducing a thin-film dewetting through
two different processes-furnace annealing and pulsed-laser annealing. The effects of annealing temperature,
film thickness and laser energy density on dewetting morphology and mechanism were investigated. Co thinfilms
with thicknesses between 3 to 15 nm were deposited using ion-beam sputtering, and then, in order to
induce dewetting, thermally annealed in furnace at temperatures between 600 and 900˚C. Some as-deposited
films were irradiated using a Nd-YAG pulsed-laser of 266 nm wavelength to induce dewetting in liquid-state.
Films annealed in furnace agglomerated to form nanoparticles above 700˚C, and those average particle size
and spacing were increased with an increase of film thickness. On the laser annealing process, above the
energy density of 100 mJ/cm2, metal films were completely dewetted and the agglomerated particles exhibited
greater size uniformity than those on the furnace annealing process. A detailed dewetting mechanism
underlaying both processes were discussed.

영어초록

Co nanoparticles on silica substrates were fabricated by inducing a thin-film dewetting through
two different processes-furnace annealing and pulsed-laser annealing. The effects of annealing temperature,
film thickness and laser energy density on dewetting morphology and mechanism were investigated. Co thinfilms
with thicknesses between 3 to 15 nm were deposited using ion-beam sputtering, and then, in order to
induce dewetting, thermally annealed in furnace at temperatures between 600 and 900˚C. Some as-deposited
films were irradiated using a Nd-YAG pulsed-laser of 266 nm wavelength to induce dewetting in liquid-state.
Films annealed in furnace agglomerated to form nanoparticles above 700˚C, and those average particle size
and spacing were increased with an increase of film thickness. On the laser annealing process, above the
energy density of 100 mJ/cm2, metal films were completely dewetted and the agglomerated particles exhibited
greater size uniformity than those on the furnace annealing process. A detailed dewetting mechanism
underlaying both processes were discussed.

참고자료

· 없음