Steel 기판에 듀얼 스퍼터를 이용한 Cr과 Al의 증착 및 열처리 효과 (Deposition and Heat Treatment Effect of Cr and Al using Dual Sputter on Steel Substrate)

서지정보

· 발행기관 : 한국조명.전기설비학회
· 수록지 정보 : 조명.전기설비학회논문지 / 35권 / 10호 / 1 ~ 7페이지
· 저자명 : 김경보, 이종필, 김무진

초록

In this paper, chromium and aluminum were simultaneously deposited with equipment capable of growing two different metal films for various data related to steel substrates. After that, the surface shape of the coated metal film was changed using a heat treatment equipment. The heat treatment conditions were carried out for about 1200s at each temperature of 150°C, 350°C, and 550°C. In the sample observed with the naked eye, different colors were displayed at 550°C. In order to analyze the cause of this phenomenon, the surface was first observed with an electron microscope, and the morphology was different according to the temperature. In the sample before heat treatment, the roughness value was the largest at 16.9 nm, and showed a tendency to increase with temperature to 8.4 nm at 150°C, 10.2nm at 350°C, and 12nm at 550°C. The sheet resistance decreases from 0.052ohm/sq. to 0.023ohm/sq. as the annealing temperature increases from room temperature to 550°C. The optical reflectance results can be explained by electron microscopy images. For the realization of a flexible system on a steel material, the results of this study will be applied to solar cell devices in the future to evaluate its potential.

영어초록

In this paper, chromium and aluminum were simultaneously deposited with equipment capable of growing two different metal films for various data related to steel substrates. After that, the surface shape of the coated metal film was changed using a heat treatment equipment. The heat treatment conditions were carried out for about 1200s at each temperature of 150°C, 350°C, and 550°C. In the sample observed with the naked eye, different colors were displayed at 550°C. In order to analyze the cause of this phenomenon, the surface was first observed with an electron microscope, and the morphology was different according to the temperature. In the sample before heat treatment, the roughness value was the largest at 16.9 nm, and showed a tendency to increase with temperature to 8.4 nm at 150°C, 10.2nm at 350°C, and 12nm at 550°C. The sheet resistance decreases from 0.052ohm/sq. to 0.023ohm/sq. as the annealing temperature increases from room temperature to 550°C. The optical reflectance results can be explained by electron microscopy images. For the realization of a flexible system on a steel material, the results of this study will be applied to solar cell devices in the future to evaluate its potential.

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