Effect of Film Thickness on the Photocatalytic Performance of TiO2 Film Fabricated by Room Temperature Powder Spray in Vacuum Process (Effect of Film Thickness on the Photocatalytic Performance of TiO2 Film Fabricated by Room Temperature Powder Spray in Vacuum Process)

서지정보

· 발행기관 : 한국세라믹학회
· 수록지 정보 : 한국세라믹학회지 / 45권 / 12호 / 839 ~ 844페이지
· 저자명 : 김근영, 류정호, 한병동, 최종진, 윤운하, 이병국, 박동수, 박찬

초록

TiO2 is an environment-friendly semiconducting material, and it has a strong photocatalytic activity and hydrophilic effect. There
are a lot of reports on the photocatalytic characteristics of TiO2, such as organic pollutants resolving, anti-bacterial, and self-purification
material. In this paper, TiO2 micron-sized powders were deposited on the glass by room temperature powder spray in vacuum process,
so called aerosol deposition (AD), and nano-grained TiO2 photocatalytic thin films were fabricated. The thickness of the films were
controlled by changing the number of deposition cycle. Morphologies and characteristics of the AD-TiO2 thin films were examined
by SEM, TEM, XRD, and UV-Visible Spectrophotometer. As the thickness of TiO2 films increased, surface roughness increased. By
this increment, the reaction area between film and pollutant was enlarged, resulting in better photocatalytic property.

영어초록

TiO2 is an environment-friendly semiconducting material, and it has a strong photocatalytic activity and hydrophilic effect. There
are a lot of reports on the photocatalytic characteristics of TiO2, such as organic pollutants resolving, anti-bacterial, and self-purification
material. In this paper, TiO2 micron-sized powders were deposited on the glass by room temperature powder spray in vacuum process,
so called aerosol deposition (AD), and nano-grained TiO2 photocatalytic thin films were fabricated. The thickness of the films were
controlled by changing the number of deposition cycle. Morphologies and characteristics of the AD-TiO2 thin films were examined
by SEM, TEM, XRD, and UV-Visible Spectrophotometer. As the thickness of TiO2 films increased, surface roughness increased. By
this increment, the reaction area between film and pollutant was enlarged, resulting in better photocatalytic property.

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