마이크로 렌즈 어레이 성형 공정 최적화를 위한 수치해석 (Numerical Analysis for Optimization of Micro Lens Array Forming Process)

서지정보

· 발행기관 : 한국기계가공학회
· 수록지 정보 : 한국기계가공학회지 / 22권 / 12호 / 73 ~ 80페이지
· 저자명 : 신준수, 김승모

초록

Infrared sensors, such as riders, radars, and visible light image sensors, can screen invisible objects or elements andsolve vulnerabilities. Considering wafer-level molding, microlenses, and their arrays are simultaneously molded intogeometric lenses of tens to hundreds of microscale dimensions, and the molding/imprinting process adopted by thismolding method undergoes filling, cooling, and heteromorphism. The problem with lens molding using themolding/imprinting process is contraction and deformation owing to the difference between the noncharging/air trapgeneration during the charging process of the microlens array and the thermal expansion coefficient occurring duringcooling. This problem causes a shape error between the lenses and leads to lens shape deviation by position, owingto the deformation of the wafer units. For the numerical analysis of the processes above the glass transitiontemperature (Tg), a cross model was adopted to study the multiphase flow simulation using the VOF(Volume ofFluid) method and consider the theoretical characteristics of PMMA(Polymethyl methacrylate). It includes VOFtechniques for free surface analysis, MDM techniques for glass molding, lens-shaping analysis techniques, lens-shapefilling, cooling characteristics, contraction/deformation, and methods for evaluating heterogeneous characteristics. Theaim is to develop an analysis technology to optimize the wafer-level imaging lens formation process.

영어초록

Infrared sensors, such as riders, radars, and visible light image sensors, can screen invisible objects or elements andsolve vulnerabilities. Considering wafer-level molding, microlenses, and their arrays are simultaneously molded intogeometric lenses of tens to hundreds of microscale dimensions, and the molding/imprinting process adopted by thismolding method undergoes filling, cooling, and heteromorphism. The problem with lens molding using themolding/imprinting process is contraction and deformation owing to the difference between the noncharging/air trapgeneration during the charging process of the microlens array and the thermal expansion coefficient occurring duringcooling. This problem causes a shape error between the lenses and leads to lens shape deviation by position, owingto the deformation of the wafer units. For the numerical analysis of the processes above the glass transitiontemperature (Tg), a cross model was adopted to study the multiphase flow simulation using the VOF(Volume ofFluid) method and consider the theoretical characteristics of PMMA(Polymethyl methacrylate). It includes VOFtechniques for free surface analysis, MDM techniques for glass molding, lens-shaping analysis techniques, lens-shapefilling, cooling characteristics, contraction/deformation, and methods for evaluating heterogeneous characteristics. Theaim is to develop an analysis technology to optimize the wafer-level imaging lens formation process.

참고자료

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