뜨거운 곁쌓기 법에 의해 성장된 MgGa2Se4 단결정 박막의 열처리 효과 (Effect of Thermal Annealing for MgGa2Se4 Single Crystal Thin Film Grown by Hot Wall Epitaxy)

서지정보

· 발행기관 : 한국센서학회
· 수록지 정보 : 센서학회지 / 23권 / 1호 / 51 ~ 57페이지
· 저자명 : 방진주, 김혜정, 박향숙, 강종욱, 홍광준

초록

The evaporating materials for MgGa2Se4 single crystal thin films was prepared from horizontal electric furnace. To obtain the single crystal thin films, MgGa2Se4 compounded polycrystal powder was deposited on thoroughly etched semi-insulated GaAs(100) substrate by the hot wall epitaxy (HWE) method system. The source and substrate temperatures of optimized growth conditions, were 610oC and 400oC, respectively.The source and substrate temperatures were 610oC and 400oC, respectively. The crystalline structure of the single crystal thin films was investigated by double crystal X-ray diffraction (DCXD). The temperature dependence of the energy band gap of the MgGa2Se4 obtained from the absorption spectra was well described by the Varshni's relation, Eg(T) = 2.34 eV-(8.81X10-4 eV/ K)T2/(T+251 K). After the as-grown MgGa2Se4 single crystal thin films was annealed in Mg-, Se-, and Ga-atmospheres, the origin of point defects of MgGa2Se4 single crystal thin films has been investigated by the photoluminescence (PL) at 10 K. The native defects of VMg, VSe obtained by PL measurements were classified as a donors or acceptors type. And we concluded that the heat-treatment in the Se-atmosphere converted MgGa2Se4 single crystal thin films to an optical n-type. Also, we confirmed that Ga in MgGa2Se4/GaAs did not form the native defects because Ga in MgGa2Se4 single crystal thin films existed in the form of stable bonds.

영어초록

The evaporating materials for MgGa2Se4 single crystal thin films was prepared from horizontal electric furnace. To obtain the single crystal thin films, MgGa2Se4 compounded polycrystal powder was deposited on thoroughly etched semi-insulated GaAs(100) substrate by the hot wall epitaxy (HWE) method system. The source and substrate temperatures of optimized growth conditions, were 610oC and 400oC, respectively.The source and substrate temperatures were 610oC and 400oC, respectively. The crystalline structure of the single crystal thin films was investigated by double crystal X-ray diffraction (DCXD). The temperature dependence of the energy band gap of the MgGa2Se4 obtained from the absorption spectra was well described by the Varshni's relation, Eg(T) = 2.34 eV-(8.81X10-4 eV/ K)T2/(T+251 K). After the as-grown MgGa2Se4 single crystal thin films was annealed in Mg-, Se-, and Ga-atmospheres, the origin of point defects of MgGa2Se4 single crystal thin films has been investigated by the photoluminescence (PL) at 10 K. The native defects of VMg, VSe obtained by PL measurements were classified as a donors or acceptors type. And we concluded that the heat-treatment in the Se-atmosphere converted MgGa2Se4 single crystal thin films to an optical n-type. Also, we confirmed that Ga in MgGa2Se4/GaAs did not form the native defects because Ga in MgGa2Se4 single crystal thin films existed in the form of stable bonds.

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