소수성 마이크로 패턴을 갖는 Stripe 코팅용 슬롯 다이 헤드 구조 최적화 (Structure Optimization of a Slot-Die Head with a Hydrophobic Micro-Patterns for Stripe Coatings)

서지정보

· 발행기관 : 한국반도체디스플레이기술학회
· 수록지 정보 : 반도체디스플레이기술학회지 / 18권 / 2호 / 6 ~ 10페이지
· 저자명 : 유수호, 이진영, 박종운

초록

In the presence of μ-tip for narrow stripe coating, there appears lateral capillary flow along the hydrophilic head lip because the μ-tip has some resistance to flow. It was known to be suppressed by increasing the contact angle of the head lip. In this paper, we have demonstrated by computational fluid dynamics(CFD) simulations that it can also be suppressed by the formation of micro-patterns on the shim and meniscus guide embedded into the slot-die head. To optimize the micro-patterned structure, we have performed simulations by varying the groove width, depth, and clearance. In the absence of micro-patterns, it is shown by experiment and simulation that the solution spreads to a distance of 1,300 μm from the μ-tip. In the presence of micro-patterns with the groove width and clearance of 50 μm, the distance the solution spreads is reduced to 260 μm. However, no further suppression in the capillary flow is observed with micro-patterns with the groove width of 40 μm or less. It is also observed that the capillary flow is not affected by the groove depth if it is larger than 10 μm. We have shown that the distance the solution spreads can be reduced further to 204 μm by coating a hydrophobic material (contact angle of 104º) on the surface of micro-patterns having the groove width and clearance of 50 μm.

영어초록

In the presence of μ-tip for narrow stripe coating, there appears lateral capillary flow along the hydrophilic head lip because the μ-tip has some resistance to flow. It was known to be suppressed by increasing the contact angle of the head lip. In this paper, we have demonstrated by computational fluid dynamics(CFD) simulations that it can also be suppressed by the formation of micro-patterns on the shim and meniscus guide embedded into the slot-die head. To optimize the micro-patterned structure, we have performed simulations by varying the groove width, depth, and clearance. In the absence of micro-patterns, it is shown by experiment and simulation that the solution spreads to a distance of 1,300 μm from the μ-tip. In the presence of micro-patterns with the groove width and clearance of 50 μm, the distance the solution spreads is reduced to 260 μm. However, no further suppression in the capillary flow is observed with micro-patterns with the groove width of 40 μm or less. It is also observed that the capillary flow is not affected by the groove depth if it is larger than 10 μm. We have shown that the distance the solution spreads can be reduced further to 204 μm by coating a hydrophobic material (contact angle of 104º) on the surface of micro-patterns having the groove width and clearance of 50 μm.

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