반도체 클린룸용 배기 열회수식 외기공조시스템의 에너지절감에 관한 실험적 연구 (An Experimental Study on Energy Reduction of an Exhaust Air Heat Recovery Type Outdoor Air Conditioning System for Semiconductor Manufacturing Clean Rooms)

서지정보

· 발행기관 : 대한설비공학회
· 수록지 정보 : 설비공학 논문집 / 21권 / 5호 / 273 ~ 281페이지
· 저자명 : 송근수, 유경훈, 강신영, 손승우

초록

In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of 1,000㎥/h that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.

영어초록

In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of 1,000㎥/h that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.

참고자료

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