The Effect of Uni-nanoadditive Manufactured Using RF Plasma Processing on Core-shell Structure in MLCC

서지정보

· 발행기관 : 한국세라믹학회
· 수록지 정보 : 한국세라믹학회지 / 46권 / 2호 / 131 ~ 136페이지
· 저자명 : 송순모, 김효섭, 박금진, 손성범, 김영태, 허강헌

초록

Radio frequency (RF) plasma treatment is studied for the size reduction and the spheroidization of coarse particles to change
them into nano-sized powders of spherical shape in MLCC fields. The uni-nanoadditives manufactured by RF plasma processing
for high dispersion have been investigated for the effect on core-shell structure in dielectrics of MLCC. Microstructures have been
characterized using scanning electron microscope (SEM), transmission electron microscope (TEM) and Electron Probe Micro Analyzer
(EPMA). We compared the distribution of core-shell grains between specimens manufactured using uni-nanoadditive and
using mixed additive. In addition, the uniformity of rare earth elements in the core-shell structured grains was analyzed. It was
shown, from TEM observations, that the sintered specimen manufactured using uni-nanoadditives had more dense small grains
with well-developed core-shell structure than the specimen using mixed additives, which had a homogeneous microstructure
without abnormal grain growth and shows broad temperature coefficient of capacitance (TCC) curves in all temperature ranges
because of well dispersed additives.

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