ted in mass-production. SADP(Self-Aligned Double Pattering), SAQP(Self-Aligned Quadruple Pattering ... ) and multi-mask in one layer are examples. SADP is illustrated in Figure 3.Figure 3. Self Aligned ... hift masks and off axis illumination, it can be developed beyond 100nm. In case of 157nm, however
launched the plot whose horizontal axis was the position measured by the motion sensor and whose ... vertical axis was the intensity measured by the receiver.We sled Reflector A along the Goniometer arm and ... faced each other. We then aligned the crystal so that the (100) planes were parallel to the incident