[금속공학]SEM

소개

SEM detector, 펌프, 밸브에 관한 전반전인 내용들이 있습니다.. 모든 내용이 영어로 되어있습니다.. 학교 발표에 사용했던 자료들입니다.. 유용하게 사용하시길~~~

목차

-Detectors-
Scintillator-Photomultiplier system
Light guide pipe
Photomultiplier tube (PMT)
Modification of the Everhart-Thornley detector
Take-off angle and solid angle of collection
Maximizing the collection of backscattered electrons
Conversion Detectors
Auger electron detectors
Cathodoluminescence detector

-Valves-
Rotary oil pump
Diffusion pump
Turbomolecular pump
Ion-getter pump
Vacuum Gauges
Thermal Conductivity Vacuum Gauges
Pirani gauge
Penning (Cold cathode ionization) Gauges
O-rings
Metal Gaskets
Type of valves used in electron microscopes
Gate valve
Butterfly valve

본문내용

Scintillator-Photomultiplier system
-SEM usually have an Everhart-Thornley detector system, which consists of four parts
(1) Faraday cage (2) Scintillator (3) Light guide pipe (4) Photomultilpier
-The Faraday cage is a wire mesh with large openings.
The scintillator disc, biased to +10 to +12KV, is inside the Faradaycage

Light guide pipe
-The scintillator disc generates light photon that pass through the light guide pipe by total internal reflection at the junction of the core and cladding
-The light guide pipe passes at least 40% of the photons generated in the scintillator.
A light guide pipe is a cylinder composed of clear glass or plastic and consists
of core, cladding

Take-off angle and solid angle of collection
-The take-off angle is the angle that the detector makes with the surface of the specimen stub.
Usually ,Everhart-Thornley detectors are placed so that the take-off angle is about 30°
-The solid angle of collection is the three-dimensional angle that the detector face makes with
the specimen and is measured in steradians.
The closer the detector is to the specimen, the larger is the solid angle of collection

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