Effect of Reaction Temperature on the Geometry of Carbon Coils Formed by SF6 Flow Incorporation in C2H2 and H2 Source Gases

서지정보

· 발행기관 : 한국진공학회
· 수록지 정보 : Applied Science and Convergence Technology / 21권 / 1호 / 48 ~ 54페이지
· 저자명 : 김성훈

초록

Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using C2H2 and H2 as source gases and SF6 as an additive gas under thermal chemical vapor deposition system. The geometries of as-grown carbon materials were investigated with increasing the reaction temperature as the increment of 25℃ from 650℃ up to 800℃. At 650℃, the embryos for carbon coils were formed. With increasing the reaction temperature to 700℃, the coil-type geometries were developed. Further increasing the reaction temperature to 775℃, the development of wave-like nano-sized coils, instead of nano-sized coils, and occasional appearance of micro-sized carbon coils could be observed. Fluorine in SF6 additive may shrink the micro-sized coil diameter via the reduction of Ni catalyst size by fluorine’s etching role. Finally, the preparation of the micro-sized carbon coils having the smaller coil diameters, compared with the previously reported ones, could be possible using SF6 additive.

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