전해질용액의 조성 에 따른 기공성 실리콘의 나노구조적 광학적 특징의 변화

목차

1. INTRODUCTION
2. EXPERIMENTAL PROCEDURES
3. RESULTS AND DISCUSSION
4. CONCLUSIONS

본문내용

1. INTRODUCTION
Electrochemical anodic etching has attracted considerable attention in the fabrication of porous silicon (PS) because
this method can provide a range of conditions to control the structural and physical properties of the etched layers.
In addition, this method is simple and economical [1,2].
Nanostructural variations occur on the etched surface according to the composition and physical properties of the electrolytes.
The nanostructural difference results in the various optical and chemical features of the porous layers. The interface
between the wafer surface and electrolyte is affected by the physical and chemical conditions of the electrolytes [3-5].
Some studies reported that the structural variations in electrochemically-etched PS also occur according to the temperature of the electrolytes [5-7].
Electrolytes are normally composed of de-ionized water(DIW), HF and solvents, such as ethanol and glycerin [8].
Alcohols, such as methanol (CH4O), ethanol (C2H6O), and isopropyl alcohol (C3H8O, IPA) are used frequently as the
solvent materials for electrochemical etching [8-10].

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