Dielectric Properties of Al2O3 Thick Films Grown by Aerosol Deposition Method (Dielectric Properties of Al2O3 Thick Films Grown by Aerosol Deposition Method)

서지정보

· 발행기관 : 한국세라믹학회
· 수록지 정보 : 한국세라믹학회지 / 45권 / 7호 / 411 ~ 417페이지
· 저자명 : 박재창, 윤영준, 김효태, 구은회, 남송민, 김종희, 심광보

초록

Aerosol Deposition Method (ADM) is a novel technique to grow ceramic thick films with high density and nano-crystal structure
at room temperature.1,2) For these unique advantages of ADM, it would be applied to the fabrication process of 3-D integration ceramic
modules effectively. However, it is critical to control the properties of starting powders, because a film formation through ADM is
achieved by impaction and consolidation of starting powders on the substrates. We fabricated alumina thick films by ADM for the
application to integral substrates for RF modules. When the as-received alumina powders were used as a starting material without any
treatments, it was observed that the dielectric properties of as-deposited alumina films, such as relative permittivity and loss tangent,
showed high dependency on the frequency. In this study, some techniques of powder pre-treatments to improve the dielectric properties
of alumina thick films will be shown and the effects of starting powders on the properties of AD films will be discussed.

영어초록

Aerosol Deposition Method (ADM) is a novel technique to grow ceramic thick films with high density and nano-crystal structure
at room temperature.1,2) For these unique advantages of ADM, it would be applied to the fabrication process of 3-D integration ceramic
modules effectively. However, it is critical to control the properties of starting powders, because a film formation through ADM is
achieved by impaction and consolidation of starting powders on the substrates. We fabricated alumina thick films by ADM for the
application to integral substrates for RF modules. When the as-received alumina powders were used as a starting material without any
treatments, it was observed that the dielectric properties of as-deposited alumina films, such as relative permittivity and loss tangent,
showed high dependency on the frequency. In this study, some techniques of powder pre-treatments to improve the dielectric properties
of alumina thick films will be shown and the effects of starting powders on the properties of AD films will be discussed.

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