상용 Al2O3 분말의 비교분석 및 이를 이용하여 제조한 슬러리의 분산 특성 (Comparative Analysis of Commercial Al2O3 Powders and the Dispersion Characteristics of Slurries Produced Using Them)

서지정보

· 발행기관 : 한국재료학회
· 수록지 정보 : 한국재료학회지 / 34권 / 1호 / 27 ~ 33페이지
· 저자명 : 권모세, 유승준, 김진호, 정경훈, 이종근, 김응수

초록

Al2O3 has excellent sintering properties and is important in semiconductor manufacturing processes that require high-temperature resistance and chemical inertness in a plasma environment. In this study, a comprehensive analysis of the chemical characteristics, physical properties, crystal structure, and dispersion stability of three commercially available Al2O3 powders was conducted. The aim was to provide a technological foundation for selecting and utilizing appropriate Al2O3 powders in practical applications. All powders exhibited α-Al2O3 as the main phase, with the presence of beta-phase Na2O-11Al2O3 as the secondary phase. The highest Na+ ion leaching was observed in the aqueous slurry state due to the presence of the secondary phase. Although the average particle size difference among the three powders was not significant, distinct differences in particle size distribution were observed. ALG-1SH showed a broad particle size distribution, P162 exhibited a bimodal distribution, and AES-11 displayed a uniform unimodal distribution. Highconcentration Al2O3 slurries showed differences in viscosity due to ion release when no dispersant was added, affecting the electrical double-layer thickness. Polycarboxylate was found to effectively enhance the dispersion stability of all three powders. In the dispersion stability analysis, ALG-1SH exhibited the slowest sedimentation tendency, as evidenced by the low TSI value, while P162 showed faster precipitation, influenced by the particle size distribution.

영어초록

Al2O3 has excellent sintering properties and is important in semiconductor manufacturing processes that require high-temperature resistance and chemical inertness in a plasma environment. In this study, a comprehensive analysis of the chemical characteristics, physical properties, crystal structure, and dispersion stability of three commercially available Al2O3 powders was conducted. The aim was to provide a technological foundation for selecting and utilizing appropriate Al2O3 powders in practical applications. All powders exhibited α-Al2O3 as the main phase, with the presence of beta-phase Na2O-11Al2O3 as the secondary phase. The highest Na+ ion leaching was observed in the aqueous slurry state due to the presence of the secondary phase. Although the average particle size difference among the three powders was not significant, distinct differences in particle size distribution were observed. ALG-1SH showed a broad particle size distribution, P162 exhibited a bimodal distribution, and AES-11 displayed a uniform unimodal distribution. Highconcentration Al2O3 slurries showed differences in viscosity due to ion release when no dispersant was added, affecting the electrical double-layer thickness. Polycarboxylate was found to effectively enhance the dispersion stability of all three powders. In the dispersion stability analysis, ALG-1SH exhibited the slowest sedimentation tendency, as evidenced by the low TSI value, while P162 showed faster precipitation, influenced by the particle size distribution.

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