반도체 클린룸용 배기 열회수식 에어와셔 시스템의 에너지절감에 관한 수치해석 (Numerical Analysis on Energy Reduction of an Exhaust-Air-Heat-Recovery Type Air Washer System for Semiconductor Manufacturing Clean Rooms)

서지정보

· 발행기관 : 대한설비공학회
· 수록지 정보 : 설비공학 논문집 / 22권 / 10호 / 697 ~ 703페이지
· 저자명 : 송근수, 김형태, 유경훈, 손승우, 신대건, 김영일

초록

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants from the outdoor air introduced into a clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is useful for reducing the outdoor air conditioning load required to maintain a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to cool or heat the outdoor air. In the present study, numerical analysis was conducted to evaluate the recovered heat of an exhaust air heat recovery type air washer system, which is the key part of an energy saving outdoor air conditioning system for semiconductor clean rooms. The present numerical results showed relatively good agreement with the available experimental data.

영어초록

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants from the outdoor air introduced into a clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is useful for reducing the outdoor air conditioning load required to maintain a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to cool or heat the outdoor air. In the present study, numerical analysis was conducted to evaluate the recovered heat of an exhaust air heat recovery type air washer system, which is the key part of an energy saving outdoor air conditioning system for semiconductor clean rooms. The present numerical results showed relatively good agreement with the available experimental data.

참고자료

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