ITO Scribing & Cleaning A+ 레포트 건국대학교 고분자재료과학

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1. ITO Glass

ITO Glass는 투명 기판(Glass) 위에 ITO(Indium Tin Oxide의 약자이며, 투명하면서 전기가 통하는 물질) 박막을 sputtering 방법으로 코팅한 유리를 말한다. 투명 Plastic film 또는 sheet 기판에도 적용이 가능하다. 모든 디스플레이에 공통적으로 사용되고 또한 필수적인 것이 투명전극으로 불리는 ITO Glass이다. 이들의 조성은 90In2O3-10SnO3부근으로 보다 높은 투명도와 전도도, 그리고 평탄도를 갖도록 공정제어가 행해지고 있다. 이들은 디스플레이에서의 투명전극으로의 응용 이외에 대전방지막, 열반사막, EMI 방지막, 면발열체, 광전변환소자 등 다양한 응용처를 가지고 있다.
2. ITO Cleaning

ITO를 전처리 하는 방법은 다양하지만 Toluene, DI water, IPA, MeOH, Detergent(Alconox), Acetone, Hot plate, UVO Cleaning 등의 방법을 이용하여 ITO 기판의 표면을 세정하고 친수성을 높이는 과정이 필요하다. 이를 통해 ITO 표면의 유기물 및 오염물을 제거하고 소자의 성능과 수율을 향상시킬 수 있다.
3. Scribing

웨이퍼를 다수의 칩으로 잘라내기 위해 다이아몬드 커터 등으로 웨이퍼 표면에 가로 · 세로로 흠을 내는 것을 Scribing이라고 한다. 스크라이브한 웨이퍼는 롤러로 가볍게 롤함으로써 칩으로 분리할 수 있다.
4. Wet Cleaning

반도체 공정 중에 발생되는 오염물을 제거하기 위해 Wet Process를 이용하는데, Wet Station은 Cleaning, Etching, Develop, Strip 등의 작업을 수행할 수 있는 대표적인 장비이다. 다양한 세정 용액과 공정 조건을 활용하여 기판 표면의 오염물을 효과적으로 제거할 수 있다.
5. Dry Cleaning

건식 세정 기술에는 UV/Ozone 세정, Plasma 세정, 드라이 아이스 스크러빙, 레이저 에너지를 이용한 스크러빙 등이 있다. 이러한 방법들은 액체를 사용하지 않고 물리적/화학적 반응을 통해 기판 표면의 유기물, 금속 오염물, 자연 산화막 등을 제거할 수 있다.

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1. ITO Glass

ITO (Indium Tin Oxide) glass is a critical component in various display technologies, including LCD, OLED, and touch screens. It serves as a transparent conductive layer that enables the display to function effectively. The advantages of ITO glass include its high optical transparency, low electrical resistance, and compatibility with a wide range of manufacturing processes. However, the limited availability and high cost of indium, the primary material in ITO, have driven the search for alternative transparent conductive materials. Ongoing research and development in this area aim to find cost-effective and environmentally friendly solutions that can maintain the performance characteristics of ITO while addressing the supply and sustainability concerns. As display technologies continue to evolve, the importance of ITO glass and the need for innovative alternatives will remain a key focus in the industry.
2. ITO Cleaning

Proper cleaning of ITO (Indium Tin Oxide) glass is crucial for maintaining the performance and reliability of display devices. ITO cleaning involves the removal of contaminants, such as organic residues, metal particles, and other impurities, from the surface of the ITO layer. This process is essential to ensure optimal optical and electrical properties, as well as to prevent issues like poor adhesion, increased resistance, and reduced transparency. Effective ITO cleaning techniques, such as wet chemical cleaning, plasma cleaning, and laser cleaning, have been developed to address these challenges. The choice of cleaning method depends on the specific requirements of the display application, the nature of the contaminants, and the overall manufacturing process. Continuous advancements in ITO cleaning technologies are necessary to keep pace with the evolving display industry and ensure the consistent quality and performance of ITO-based devices.
3. Scribing

Scribing is a critical process in the manufacturing of display panels, particularly for LCD and OLED technologies. It involves the precise cutting or scoring of the glass substrate along predetermined lines to create individual display units or modules. Accurate scribing is essential for minimizing defects, ensuring proper alignment, and facilitating the subsequent separation of the display panels. The scribing process requires the use of specialized equipment, such as laser scribers or mechanical scribers, which can accurately control the depth, width, and positioning of the scribe lines. Advancements in scribing technologies, including the use of high-precision laser systems and advanced control algorithms, have enabled the production of increasingly smaller and more complex display panels with improved yield and quality. As display sizes and resolutions continue to increase, the importance of reliable and efficient scribing techniques will remain a critical aspect of the display manufacturing ecosystem.
4. Wet Cleaning

Wet cleaning is a crucial process in the manufacturing of display panels, particularly for LCD and OLED technologies. It involves the use of liquid-based cleaning solutions to remove various contaminants, such as organic residues, metal particles, and ionic impurities, from the surface of the display substrate. Effective wet cleaning is essential for maintaining the optical and electrical properties of the display, as well as ensuring the proper adhesion of subsequent layers. The wet cleaning process typically includes a series of steps, such as pre-cleaning, main cleaning, rinsing, and drying, each of which is carefully optimized to achieve the desired level of cleanliness. Advancements in wet cleaning technologies, including the development of more effective cleaning solutions, improved cleaning equipment, and advanced process control, have enabled the production of increasingly complex and high-performance display panels with improved yield and reliability. As display technologies continue to evolve, the importance of efficient and environmentally-friendly wet cleaning processes will remain a critical aspect of the display manufacturing industry.
5. Dry Cleaning

Dry cleaning is an important complementary process to wet cleaning in the manufacturing of display panels, particularly for LCD and OLED technologies. Dry cleaning techniques, such as plasma cleaning and laser cleaning, are used to remove contaminants and residues that are difficult to remove using wet cleaning methods. Plasma cleaning, for example, utilizes a high-energy ionized gas to effectively remove organic and inorganic contaminants from the surface of the display substrate. Laser cleaning, on the other hand, employs a focused beam of light to selectively remove targeted contaminants without damaging the underlying material. The combination of wet and dry cleaning processes ensures a comprehensive and effective cleaning of the display substrate, which is crucial for maintaining the optical, electrical, and adhesion properties of the display. Advancements in dry cleaning technologies, including the development of more efficient and environmentally-friendly processes, have enabled the production of increasingly complex and high-performance display panels with improved yield and reliability. As display technologies continue to evolve, the integration of advanced wet and dry cleaning techniques will remain a critical aspect of the display manufacturing industry.