[예비 / 결과레포트] 유기물을 이용한 마이크로 패턴 제작

소개글

화학공학 실험 중 `유기물을 이용한 마이크로 패턴 제작 실험` 예비 / 결과레포트입니다. 자세한 실험 결과를 토대로 책에 나와있는 각종 문제를 상세한 설명과 함께 풀이하였습니다. 한 문제도 빠트리지 않고 정확한 데이터와 함께 문제를 풀었습니다. 이 레포트만 있다면 `유기물을 이용한 마이크로 패턴 제작 실험` 예비 및 결과 레포트는 완벽하게 작성할 것입니다. 또한, 레포트의 마지막에 토의 내용도 있기 때문에 레포트 작성이 더욱 수월할 것이라 생각됩니다.

목차

1. Objective
2. Theory
3. Apparatus
4. Chemistry
5. Procedure
6. Attention
7. Results
8. Discussion
9. Reference

본문내용

1. Objective
Understand basic principles of micro-scale patterning process technology of semiconductors, display devices and MEMS(Micro-electro mechanical system) through experiment on developing micro-channel of glass surface.

2. Theory
✔ Introduction of MEMS(Micro-Electro-Mechanical)
Micro-Electro-Mechanical Systems is the integration of mechanical elements, sensors actuators, and electronics on a common silicon substrate through micro-fabrication technology. While the electronics are fabricated using integrated circuit(IC) process sequences, the micromechanical components are fabricated using compatible.
"micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.
MEMS promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of micro-sensors and micro-actuators and expanding the space of possible designs and applications.

참고 자료

- Design, Manufacture, and Nanoscale Engineering 2nd Ed./
- TAI-RAN HSU/ 2008/ MEMS AND MICROSYSTEMS;
- Wanjun Wang, Steven A, Soper/ 2007/ Bio-MEMS;
- Technologies and Applications/ CRC Press/ P. 12-40
- http://blog.naver.com/gpsptm05?Redirect=Log&logNo=110005720516
- http://www.memsnet.org/mems/what-is.html
- http://www.biochip.or.kr/website/index.php
- http://popsci.hankooki.com/main.php
- http://www.ece.gatech.edu/research/labs/vc/theory/photolith.html
- Chemical Engineering Laboratory Ⅱ - SungKyunKwan Univ. Chemical Engineering.