Wet and Dry etching Technology

소개글

Wet etching과 dry etching의 공통점과 차이점을 저널 형식으로 정리해 놓았습니다.
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한글 아닙니다.

목차

Title : Wet and Dry etching Technology of Bulk-micromachining

Ⅰ. Introduction
Ⅱ. Etching
1.Etching parameters
2.Wet Etching
3.Dry Etching
Ⅲ. Differences
Ⅳ. Summary
References

본문내용

Ⅰ. Introduction

MEMS(Micro-Electric Mechanical System) is a field of implementation and application of new system that include and combine to manufacture subminiature electric mechanical devices by manufacturing-process for semiconductor.


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참고 자료

Applied Physics by E. Chen
by Jin-Sung Cheo
from Connections by Andrew R.
Barron.
By Duan, Xuefeng, McGill University
[6] By Andreou and J. Wang