저온 ALD로 제조된 TiO2 나노 박막 물성 연구

서지정보

ㆍ발행기관 : 한국재료학회 ㆍ수록지정보 : 한국재료학회지 / 18권 / 10호
ㆍ저자명 : 윤기정, 송오성

영어 초록

We fabricated 10 nm-TiO2 thin films for DSSC (dye sensitized solar cell) electrode application using ALD (atomic layer deposition) method at the low temperatures of 150˚ and 250˚. We characterized the crosssectional microstructure, phase, chemical binding energy, and absorption of the TiO2 using TEM, HRXRD, XPS, and UV-VIS-NIR, respectively. TEM analysis showed a 10 nm-thick flat and uniform TiO2 thin film regardless of the deposition temperatures. Through XPS analysis, it was found that the stoichiometric TiO2 phase was formed and confirmed by measuring main characteristic peaks of Ti 2p1, Ti 2p3, and O 1s indicating the binding energy status. Through UV-VIS-NIR analysis, ALD-TiO2 thin films were found to have a band gap of 3.4 eV resulting in the absorption edges at 360 nm, while the conventional TiO2 films had a band gap of 3.0 eV (rutile)~3.2 eV (anatase) with the absorption edges at 380 nm and 410 nm. Our results implied that the newly proposed nano-thick TiO2 film using an ALD process at 150˚ had almost the same properties as thsose of film at 250˚. Therefore, we confirmed that the ALD-processed TiO2 thin film with nano-thickness formed at low temperatures might be suitable for the electrode process of flexible devices.

참고 자료

없음