프리세라믹폴리머로부터 유도된 탄화규소 코팅에 관한 연구
(주)학지사
- 최초 등록일
- 2016.06.07
- 최종 저작일
- 2015.06
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서지정보
ㆍ발행기관 : 한국열환경공학회
ㆍ수록지정보 : 열환경공학 / 12권 / 1호
ㆍ저자명 : 정운성, 신동근, 이윤주, 권우택, 김영희, 김수룡
목차
1. 서 론
2. 실 험
3. 결과 및 고찰
4. 결 론
참고문헌
한국어 초록
영어 초록
The SiC coatings were prepared by spin coating of polycarbosilane on the silicon wafer
which acts as precermaic precursor of SiC and pyrolysis at 1200℃. Thickness of SiC
coating was increased in proportional to the polycarbosilane solution concentration and
reached to 0.95μm at the concentration of 230g/l. There were clean and no cracks were
observed on the surface and the adhesion also seemed to be good. The coating were
composed of SiC nanocrystals and some α-crystobalite (SiO2) come from curing process.
During pyrolysis after coating and curing of polycarbosilane coating on the silicon
wafer, polycarbosilane was decomposed away its organic pandents and remained Si-C
backbone which act as SiC crystal formation.
Keyword: silicon carbide, coating, film, preceramic polymer, spin coating, energy
efficiency
참고 자료
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