스퍼터링 타겟용 저온 분사 Cu-15 at.%Ga 코팅 소재의 특성에 미치는 열처리 분위기의 영향
(주)코리아스칼라
- 최초 등록일
- 2016.04.01
- 최종 저작일
- 2011.12
- 10페이지/ 어도비 PDF
- 가격 4,000원
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서지정보
ㆍ발행기관 : 한국분말야금학회
ㆍ수록지정보 : 한국분말야금학회지 / 18권 / 6호
ㆍ저자명 : 최병철, 박동용, 김형준, 오익현, 이기안
영어 초록
This study attempted to manufacture a Cu-15 at.%Ga coating layer via the cold spray process and investigated the effect of heat treatment environment on the properties of cold sprayed coating material. Three kinds of heat treatment environments, +argon, pure argon, and vacuum were used in this study. Annealing treatments were conducted at /1 hr. With the cold sprayed coating layer, pure -Cu and small amounts of were detected in the XRD, EDS, EPMA analyses. Porosity significantly decreased and hardness also decreased with increasing annealing temperature. The inhomogeneous dendritic microstructure of cold sprayed coating material changed to the homogeneous and dense one (microstructural evolution) with annealing heat treatment. Oxides near the interface of particles could be reduced by heat treatment especially in vacuum and argon environments. Vacuum environment during heat treatment was suggested to be most effective one to improve the densification and purification properties of cold sprayed Cu-15 at.%Ga coating material.
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