자동차 부품 응용을 위한 자왜 박막의 기판효과
(주)코리아스칼라
- 최초 등록일
- 2016.04.01
- 최종 저작일
- 2013.04
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서지정보
ㆍ발행기관 : 한국기계기술학회
ㆍ수록지정보 : 한국기계기술학회지 / 15권 / 2호
ㆍ저자명 : 이흥식
목차
Abstract
1. 서론
2. 자기변형 작동기의 제작
3. 자기적 특성 평가
4. 기계적 특성 평가
5. 결론
참고문헌
영어 초록
Magnetostrictive thin films can be applied in transmission system for the enhancement of energy efficiency. In this study, four kinds of substrates (Si, glass, Fe, polyimide) with the magnetostrictive thin film layers are prepared and investigated to characterize the magnetic and mechanical behaviors due to the substrates effects. The fabricated substrates have thicknesses of 50, 150 and 500um with cantilever shape. TbDyFe films are deposited by DC magnetron sputtering with 1~10m thick. The deposited film thicknesses are verified using X-ray diffraction. The magnetization of each sample is examined using VSM(Vibrating Sample Magnetometer) and magnetostriction is also measured using capacitance method to characterize magneto-mechanical behaviors. The magnetostriction results as deflections are compared and the results are discussed for micro actuator applications.
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