PFCs 처리를위한 열플라즈마 공정
(주)학지사
- 최초 등록일
- 2016.06.07
- 최종 저작일
- 2009.01
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서지정보
ㆍ발행기관 : 한국열환경공학회
ㆍ수록지정보 : 열환경공학 / 6권 / 1호
ㆍ저자명 : 박동화, 손홍선
목차
1. 서 론
2. 산업용 열플라즈마 공정
3. 열플라즈마를 이용한 PFCs 처리
4. 기 타
5. 결론 및 전망
참고문헌
한국어 초록
영어 초록
PFCs(Perfluorocompounds) are global warming materials and should be treated in the
semiconductor industry. Compared to carbon dioxide, the generation amount of PFCs is relatively
small; however, the GWP (Global Warming Potential) of PFCs is very higher thus causing great
contribution to the global warming. In this review paper the characteristics of the thermal plasma
process for PFCs decomposition were described. Generally thermal plasma processing is applied to
nanopowder production, toxic gases treatment, etc because of its high temperature, high activity,
great quenching, etc. However, in this paper we only discuss the thermal decomposition of PFCs.
Firstly thermodynamic analyses were performed to investigate the chemical routes of PFCs
decomposition. As the result, the steam plasma is considered to be a powerful candidate for the
safe PFCs decomposition. However, presently the steam plasma is under development; therefore,
only the fundamental study can be performed presently. The advantages of thermal plasma
processing for PFCs decomposition are high efficiency, large volume treatment, etc. For the
combustion method, although the large volume treatment is possible, the decomposition efficiency
is lower. For the low-temperature plasma method, the large volume treatment is not suitable.
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