LIGA 금형몰드를 이용한 Fe-Ni계 나노분말의 초미세 가스베어링 제조
(주)코리아스칼라
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- 2016.04.01
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- 2012.04
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서지정보
ㆍ발행기관 : 한국분말야금학회
ㆍ수록지정보 : 한국분말야금학회지 / 19권 / 2호
ㆍ저자명 : 손수정, 조영상, 김대종 김종현, 장석상, 최철진
영어 초록
This paper describes the manufacturing process of tilting pad gas bearing with a diameter of 5 mm and a length of 0.5-1 mm for power MEMS (Micro Electomechanical Systems) applications. The bearing compacts with nanopowder feedstock were prepared by Ni-metal mold with 2-mold system using LIGA process. The effect of the manufacturing conditions on sintering properties of nanopowder gas bearing was investigated. In this work, Fe-45 wt%Ni nanopowder with an average diameter of 30-50 nm size was used as starting material. After mixing the nanopowder and the wax-based binders, the amount of powder was controlled to obtain the certain mixing ratio. The nanopowder bearing compacts were sintered with 1-2 hr holding time under hydrogen atmospheres and under temperatures of to . Finally, the critical batch of mixed powder system was found to be 70% particle fraction in total volume. The maximum density of the sintered bearing specimen was about 94% of theoretical density.
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