때려내기에 의한 박막 증착 (스퍼터링, Sputtering)

소개글

고체물리 실험 시간에 배우는 스퍼터링에 관한 프레젠테이션 자료입니다.
(실험 사진도 포함)

목차

1. Objective
2. Theories
1) What is sputtering?
2) Example of sputtering
3) Sputtering process
4) Vacuum system
3. Experiment
1) condition
2) result
3) analysis
4. Summary

본문내용

Definition
“Sputtering” is a used to deposit on for a wide variety of commercial and scientific purpose.

Properties
Sputtering is a relatively high energy process.
The sputtered atoms leave with several eV.

This high energy is very good for the thin film growth process.
It leads to hard dense films.

참고 자료

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