Dry etching(건식 식각)

소개글

Dry etching(건식 식각)에 관련된 ppt 자료입니다.

목차

1. Dry Etching-Introduction(1)
1. Dry Etching-Introduction(2)
1. Dry Etching-Plasma Etching(1)
1. Dry Etching-Plasma Etching(2)
1. Dry Etching-Reactive Ion Etching

본문내용

1. Etching Issues
1) Isotropy ↔ Anisotropy

2. Advantage
1) Eliminates handling of dangerous acids and solvents
2) Uses small amounts of chemicals
3) Anisotropy -> Less undercutting
4) Directional etching without using the crystal orientation
5) Better process control , etching rate
6) Capable of defining small feature size (< 100 nm)

참고 자료

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