[Nano Imprinting] Applications Of Nano Imprinting

소개글

제가 직접 작성했습니다. 차세대 반도체 기술인 nano imprinting의 응용분야, 원리 및 화학적 표면처리 방법에 대해서 작성했습니다.

목차

1. Introduction
2. Photo Lithography
3. Nano Imprinting
4. Prospect and marketability
5. Chemical surface treatment 1
6. Chemical surface treatment 2
7. Applications Of Nano Imprinting
8. REFERENCE

본문내용

중요한 내용이라서 올리는 것이 어렵습니다.

참고 자료

● L.Jay Guo, Ph.D. "Nanoimprinting Technigue and its Applications" - CBIMMS Invited Seminar
● 이재종, 장원석 " 나노스케일 3D현상 패터닝 기술" - 특집 나노메카트로닉스
● George M. Prof " Soft Lithography" - 1998, 37,
551-575
● D.Yeol Ryu, D.JUN Lee, and Jin Kon Kim " Effect of Hydrostatic Pressure on Closed-Loop Phase Behavior of Block Copolymers - Physical review letters
● M. J. Madou, Fundamentals of Microfabrication, CRC Press, 2001.
● Y. Chen and A. Pepin, "Nanofabrication: Conventional and
Nonconventional Methods", Electrophoresis, 22, pp.187-207, 2001.
● Gregory Timp " Nanotechnolgy" - T174.4.N373 1998
● www.nanonex.com
● www.sciencenews.co.kr
● www.nanondevice.com/
● www.postech.ac.kr/mse/NMD/project/page/research_k.html
● www.ebn.co.kr