[재료공학] 초음파 분무 분해법의 종류와 박막증착

소개글

2004년도 박막공학이라는 수업의 term paper 제출 자료입니다.
초음파분무 열분해법의 종류와 그에 의한 박막증착에 관하여 작성한 자료입니다.
감사합니다.

목차

I. Introduction
II. The spray pyrolysis technique(powder and film deposition).
II-1. The principles
II-2. The various type of SP
II-3. The thin film deposition from spray pyrolysis
II-4. Example of thin film made by spray pyrolysis method.
III. Conclusions

본문내용

Introduction
The chemical spray pyrolysis technique(SP) has been, during last three decades, one of the major techniques to deposit a wide variety of materials in thin film form. The prime requisite for obtaining good quality thin film is the optimization of preparative conditions such as substrate temperature, spray rate, concentration of solution etc.
However, in recent years an emphasis has been given to a variety of atomization techniques such as ultrasonic nebulisation, improved spray hydrolysis, corona spray pyrolysis, electrostatic spray pyrolysis and microprocessor based spray pyrolysis. This is the most critical parameter as it enables control over the size of the droplets and their distribution over the preheated substrates.
The enhancement in deposition efficiency and improvement in quality of the thin films can be achieved with these atomization techniques. Also, the concern of non-practice materials has being larger. Because nano-particle have so many different..

참고 자료

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